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Novel reliable RF capacitive MEMS switches with photodefinable metal-oxide dielectricsGUOAN WANG; ROMEO, Michael; HENDERSON, Cliff et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 3, pp 550-555, issn 1057-7157, 6 p.Article

Wafer-Level Transfer Technologies for PZT-Based RF MEMS SwitchesGUERRE, Roland; DRECHSLER, Ute; BHATTACHARYYA, Debabrata et al.Journal of microelectromechanical systems. 2010, Vol 19, Num 3, pp 548-560, issn 1057-7157, 13 p.Article

A Non-Contact-Type RF MEMS Switch for 24-GHz Radar ApplicationsPARK, Jaehong; EUN SUB SHIM; CHOI, Wooyeol et al.Journal of microelectromechanical systems. 2009, Vol 18, Num 1, pp 163-173, issn 1057-7157, 11 p.Article

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operationLEE, Hee-Chul; PARK, Jae-Yeong; BU, Jong-Uk et al.IEEE microwave and wireless components letters. 2005, Vol 15, Num 4, pp 202-204, issn 1531-1309, 3 p.Article